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Oklahoma State University

ECEN 5843 - Class Notes

Introduction

Evolution of semiconductor fabrication

Overview - Making the microchip

Contamination Control

Semiconductor Materials

Wafer Manufacturing

Photolithography

Advanced Lithography

Laboratory Safety

Etching

Deposition I

Deposition II

Vacuum Systems

Micro Chips

Oxidation

Doping

Dicing

Packaging

Formation of Microelectronic Devices